這裡好像在強調10nm node要靠EUV.
但是EUV到目前為止還是不夠力,
針對IBM&ASML革命性的EUV產能突破,
其實是差現實狀況很多,有人評論:
http://www.eetimes.com/document.asp?doc_id=1323353
EUV Results Bogus, Says Analyst
Intel的下一代的10nm已經擺明不需要用到EUV,
然後最近又繼續補刀連7nm都要考慮能不用EUV.
http://ppt.cc/WLPv
Intel forges ahead to 7nm – without the use of EUV lasers
然後一般業界的評估是,
要用上EUV大概是7nm製程以後了.
http://tigrand.blogspot.com/2014/12/7euv.html
台積電將在7奈米製程節點使用EUV？
看來使不使用EUV來做10nm/7nm
會成為Intel跟TSMC技術上的分岔點,
最後誰會是對的一方呢?
※ 引述《Lazulite (Trade Off)》之銘言：
: 先不談三星挖角成功or叛將了，我們請google大神來看看台積未來n10發展趨勢。
: 首先來看看n10要用什麼技術
: http://www.asml.com/doclib/investor/asml_3_Investor_Day-Many_ways_to_shrink_MvdBrink1.pdf
: Slide25~30
: 1.10nm logic design can be done in 1D
: ..but at the penalty of 15% larger die at comparable design rules
: 2.EUV: reduced complexity & design rule simplification
: Allowing 2D structures and potentially better yield
: 3.EUV lowest cost and complexity for 2D structures
: 4.Continued significant cost reduction viewed as possible
: 5.EUV supports “free functionality” for the 7nm node
: 再來看看台積對EUV技術的投資
: http://optics.org/news/5/11/35
: TSMC orders production EUV systems
: ASML said that two NXE:3350B EUV systems were scheduled for delivery to TSMC
: in 2015, while two other NXE:3300B systems that the chip maker already owns
: will be upgraded to the full production-scale performance.
: →已有兩台再追加兩台EUV量產機
: http://electronics360.globalspec.com/article/4760/tsmc-orders-euv-lithography-tools-for-production
: The new NXE:3350B machines are reported to cost €70 million (about US$90
: million) although whether TSMC will pay that price or obtain discounts as
: first user is likely to remain confidential
: Van Hout said that 40W source has been demonstrated for continuous operation
: for more than two months and that 80W operation was good for 24 hours and
: that 100W has been demonsrated for a 60-minute run. An optical source power
: of 80W is equivalent to about 55 wafers per hour or 500 wafers per day.
: →一台EUV要價USD$90million →四台=360million USD
: →80W EUV可提供55wafers/hour或是500 wafers/day
: http://www.asml.com/doclib/investor/asml_6_Investor_Day-EUV_FvHout1.pdf
: Slide13，Continuous stable source operation at 80W for 24 hrs.
: →TSMC EUV機台已可提供穩定80W EUV power
: →目前有2台x500 wafers/day 的n10產能
: http://www.asml.com/doclib/investor/asml_6_Investor_Day-EUV_FvHout1.pdf
: slide 17
: Availability =50% →平均而言，兩台只有一台在工作，但技術會隨時間變成熟。
: 總結：當眾多媒體還在唱雖台積電，但老張已經默默的帶領台積進入下一世代，
: 即便叛將再強，能影響的也只是一個世代的製程，畢竟新一代的製程又是
: 新的挑戰。
: 附記：柯P曾說過「阿米巴（原蟲）被電到都會調整方向，連阿米巴的能力都沒有。」
: 若是在PTT還不會用google判斷媒體的是非對錯，其實跟阿米巴也相差不遠了。